versión On-line ISSN 0718-0764
GARCIA, Leandro; HERNANDEZ, Julián; MENDOZA, Claudia O y GARNICA, María G. Influence of Nitrogen Flow on the Structure, Hardness and Resistivity of TiSiNO Coatings. Inf. tecnol. [online]. 2009, vol.20, n.1, pp. 21-28. ISSN 0718-0764. http://dx.doi.org/10.4067/S0718-07642009000100004.
Coatings of TiN and TiSiN were prepared by reactive direct current magnetron co-sputtering on steel and on silicon substrates, using a Ti target and a small Si plate in a reactive atmosphere of nitrogen, oxygen and argon. Using the Warren-Averbach method the structural changes were analyzed in function of the variation of the nitrogen flow. Stoichiometry calculations obtained by X-ray Energy Dispersive Spectroscopy and corroborated by Glow Discharge Spectroscopy, show that the TiSiNO coatings contain two solid solutions of TiSixN(Oy) and SiNxOy and have a strong domain on titanium oxynitrure phase. The sample made on steel and silicon wafers substrates with nitrogen flow of 3 sscm, presented the highest hardness and the lowest resistivity values, respectively, due to its preferential crystalline orientation, structure and crystalline phases present.
Palabras clave : TiSiNO coatings; hardness; resistivity; X ray diffraction; sputtering.